CVD pob zeb diamond txheej tuaj yeem muab cov khoom ua si tag nrho ntawm cov khoom siv tsis kam, muaj peev xwm txhim kho cov khoom siv tsis kam, muaj peev xwm txhim kho lub substrate ntawm cov chaw ua haujlwm ntawm cov khoom ntiag tug ntawm cov khoom. Txawm li cas los xij, kev tso nyiaj ntawm CVD pob zeb diamond txheej ntawm ntau qhov teeb meem ntawm cov txiaj ntsig ntawm CVD yog los txhim kho cov yeeb yaj kiab ua yeeb yaj kiab. Cov txheej txheem pretreators siv rau cov khoom sib txawv ntawm cov khoom sib txawv kuj sib txawv. Cia kuv muab rau koj cov lus qhia luv luv.
1. Pretrectionment ntawm cemented carbide substrates
1) Cobalt tshem tawm kev kho mob rau saum npoo
HCI, HMO3, H2Yog li4Thiab lwm cov kua qaub tau raug xaiv los mus etch cov khoom cobalt hauv cov npoo sab nraud ntawm lub substrate. Hydrogen Plasma lossis Oxygen-muaj cov ntshav ntshav kub yog siv los ua etch cobalt txhais; Tshuaj lom neeg cov tshuaj lom neeg, passivation thiab lwm cov hau kev siv los ua kom cov cobalt hauv sab nraud ntawm cov txheej txheem poob.
2) Muab cov txheej txheem hloov chaw
Pre-stacking ntawm CVD txheej thiab txheej txheem kev hloov pauv hauv nruab nrab, cov nplaum sib hloov, thiab lub pob zeb diamond, thiab tuaj yeem ua rau muaj cov teb ruaj khov. Lub hav zoov ntawm cov txheej txheem qib nrab tso cai rau kev sib txawv ntawm cov pa roj hmab los ntawm cov pa hluav taws xob ua ke los ntawm lub tob tob tob thiab ua kom muaj kev sib txawv ntawm cov pa roj ntsha ua kom zoo nkauj, yog li kev txhim kho carbide ntau thiab yog li kev txhim kho lub ntom ntom nti thiab cov nplaum.
3) Kev kho mob rau cov npoo av
Qhov saum npoo ntawm cov cemented carbide substrate yog sonicated nrog ib tug rhawv nrog cov pob zeb diamond los ntawm lub pob zeb diamond los ntawm theem nplaum, uas tuaj yeem txhim kho lub ntom ntom ntom ntom nti.
2. Pretreaticment ntawm Tooj Liab Shotrate tsos
Lub npib tsibckel hloov tau ua ntej ntawm tooj liab los ntawm cov tshuaj lom neeg sib tw thiab tus tooj liab substrate uas tsim nruab nrab ntawm cov kev pab cuam kub siab ua kom muaj kev sib tw ua yeeb yaj kiab. Cov kev tshawb fawb tseem muaj qhia tau tias kev siv ntawm titanium hloov txheej ntawm tooj liab tuaj yeem txhim kho txhim kho cov nplaum ntawm zaj duab xis puag.
3. Pretreatment ntawm cov tsos ntawm hlau lossis hlau substrate
Tungsten plating ntawm saum npoo hlau, silicon carbide ntawm high-recper \/ rherium txheej ntawm steel thiab tau cvd cov nyhuv ntawm cov hlau diamond nrog cov yeeb yaj kiab sib xyaw nrog cov duab puab zoo.
4. Silicon substrate nto pretreatment
Vim tias silicon muaj tib lo lus ntxaij ua pob zeb diamond, silicon yog qhov tseem ceeb raws li heteronitaxial matrix khoom. Txawm li cas los xij, vim muaj lub zog loj loj ntawm lub pob zeb diamond thiab loj lattice tsis sib xws ntawm cov pob zeb diamond, tus nucleation tus nqi ntawm pob zeb du silicon matrix yog tsawg heev. Qhov tso tawm ntawm pob zeb diamond epitaxial zaj duab xis nyob ntawm silicon substrate tuaj yeem pom tau los ntawm cov tshuab sib tsoo, kev siv tshuab ultrasonic carricon
Lub hom phiaj yog txhawm rau txhim kho txoj kev sib tham sib txuam ntawm cov txheej txheem cvd Thov kov tau nrog peb yog tias koj nyiam cov ntaub ntawv ntxiv.